Quantitative XPS: non-destructive analysis of surface nano-structures

The usual procedure for quantification by electron spectroscopy that is based on measured peak intensities is shown to be highly unreliable. It is pointed out that the peak shape in a wide energy range, on the low kinetic energy side of the peak, varies considerably with the surface morphology on the nano-meter depth scale. This observation has in recent years been applied in the formulation of a new method for quantification that is based on quantitative analysis of measured peak shapes. The technique is sensitive on the ∼1–10 nm depth scale and it is non-destructive. Some aspects of the physical basis of this technique are discussed and examples are given where the method has been applied in practice.