Analysis of Auger sputter depth profiles with a resolution function

We have determined the depth resolution function from the Auger sputter depth profiles ofGaAs/AlGaAsspecimens which have abrupt interfaces. We have also applied the obtained resolution function to the analysis of aGaAs/AlGaAssample containing aluminium graded-layers in order to know the effectiveness of the depth resolution function. The resulting aluminum graded-layer thickness is about 14 nm, which is in good agreement with the values estimated from the growth rate of the thin layer at preparing the specimen with molecular beam epitaxy. The resulting resolution function can be fitted by three parameters: atomic mixing, surface roughness and information depth, which was proposed by Hofmann.