Submicron particle analysis by the Auger microprobe (FE-SAM)

We have found that electrons with high primary energy improve the spatial resolution of the scanning Auger microprobe with a field emission gun (FE-SAM) in the analysis of a very small particle. Auger line scans across a 0.3 μm ⊘ alumina (Al2O3) particle on a Si substrate were performed at different primary beam voltages (5, 10, 15, and 20 kV; beam diameters were below 60 nm) by an FE-SAM instrument. Intensities of Si KLL and LVV signals at the center of the particle decreased at higher primary voltages. Electrons with higher energy will penetrate deep into the particle to reduce edge effects that drastically degrade spatial resolution.