Angular resolved EPMA analysis of thin films prepared by pulsed laser ablation of CdWO4(010)

Thin films prepared by focused 266 nm pulsed laser ablation of CdWO4(010) single crystals were analyzed with an electron probe micro analysis (EPMA) as a function of the desorbing angle θ from the normal surface, which corresponds to the position of the films. The spatial distribution of the ablated particles and the chemical composition of the films were studied by focusing the effects of O2 gas pressure and the substrate-target distance. These results were interpreted by the comparison with the size of the ablation plume determined by the photograph. The thin films with nearly the stoichiometric composition showed a photoluminescence similar to the single crystal.