Carbon Auger peak shape measurements in the characterization of reactions on (001) diamond

The measurements of Auger shape changes and peak shifts as a fingerprint for chemical changes on solid surfaces are well known. The carbon Auger peak shape changes have been measured to characterize reactions on a (001) diamond single crystal surface. Firstly the influence of Ar+ ion sputtering on the diamond surface was investigated. Upon sputtering the surface, the carbon Auger peak shape changes from the typical diamond to the graphite form within about one minute sputtering. The peak form change with time has been correlated with different diamond and graphite contributions. The decrease of the diamond contribution with sputter time has been described in terms of a transition probability of the carbon sp3 to sp2 bond. Secondly the formation of TiC at the interface of a Ti overlayer and the diamond substrate upon annealing, in order to produce good and stable ohmic contacts to the diamond, was confirmed by comparing the measured data with data simulated by calculation of the carbide and graphite contributions to the final carbon (KLL) peak shape.