Characterization of a multilayer soft X-ray reflector fabricated by pulsed laser deposition

A MorSi multilayer ML.has been fabricated as a reflector in the soft X-ray spectral region by pulsed laser deposition PLD., using the second harmonic of NdrYAG pulsed laser 5 ns, 532 nm light.. The ML structure was characterized by transmission electron microscopy TEM., small-angle X-ray scattering SAXS.and photoelectron spectroscopy for chemical analysis ESCA.. The near-normal incidence reflectivity in the spectral range of 14–17 nm was measured using a soft X-ray reflectometer based on a laser-produced plasma. The structural parameters were evaluated by fitting to both the SAXS profile and the soft X-ray reflectance measurement with asymmetric interface profile, roughness and composition taken into account. q1998 Elsevier Science B.V.