Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium

Reaction process has been studied for an atomic hydrogen-induced abstraction of methyl groups on the Ge surface. The reaction rate estimated from experiments had a very large activation energy and depended on a surface coverage of methyl groups; they are not expected for a ‘pure’ Eley–Rideal mechanism. The process can be explained by the ‘modified’ Eley–Rideal mechanism or the ‘precursor’ mechanism based on two-dimensionally bound hydrogen atoms on the surface. q1998 Elsevier Science B.V. All rights reserved