• Title of article

    Structure of nitride film hard coatings prepared by reactive magnetron sputtering

  • Author/Authors

    R. Manaila، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1998
  • Pages
    10
  • From page
    1
  • To page
    10
  • Abstract
    TiN, Ti1yxAlxN and ZrN films were deposited by electron-beam- assisted dc magnetron sputtering. X-ray diffraction showed different degrees of texture, depending on substrate bias, temperature and composition. In TiN films deposited with a high bias, microstructure changes were evidenced from lattice parameter trends, attributable to Ar inclusions. Ti1yxAlxN cubic solid solutions showed an average xs0.10. In ZrN films, a rhombohedrally-distorted phase is present, besides the cubic one. q1998 Elsevier Science B.V. All rights reserved.
  • Keywords
    TIN , ZrN , Reactive magnetron sputtering
  • Journal title
    Applied Surface Science
  • Serial Year
    1998
  • Journal title
    Applied Surface Science
  • Record number

    992760

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=992760