Sub-linear dependencies of the surface conductivity on the gas pressure

We investigated physical processes in semiconductor gas sensors and, in particular, dependencies of the surface potential and concentration of charge carriers in the space charge region of a semiconductor on the gas pressure. Corresponding sub-linear dependencies of the concentration of charge carriers on the gas pressure of an adsorbed gas are obtained both for the case describing by usual Langmuirian kinetic equation and in the case when the gas adsorption leads to a reduction in the heat of the adsorption due to a charging of the semiconductor surface.