Studies of diamond-like carbon films coated on PMMA by ion beam assisted deposition

Diamond-like carbon DLC.films on polymethylmethacrylate PMMA.substrates were prepared using ion beam assisted deposition. The carbon films deposited by Arq sputtering graphite were simultaneously bombarded by CHnq at the bombarding energies of 200–1000 eV. The morphology, structure, and bonding states of the films were characterized by Scanning electron microscopy, X-ray photoelectron spectroscopy, Raman spectroscopy, and UV–visible absorption spectroscopy respectively. Results showed that DLC films were amorphous and smooth with higher fraction of sp3 bonds in the structure of mixed sp3qsp2 bonding. The friction coefficient of the DLCrPMMA system was examined. q1999 Elsevier Science B.V. All rights reserved