Title of article
Infrared absorption analysis of organosiliconroxygen plasmas in a microwave multipolar plasma excited by distributed electron cyclotron resonance
Author/Authors
P. Raynaud، نويسنده , , T. Amilis، نويسنده , , Y. Segui، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
7
From page
285
To page
291
Abstract
P. Raynaud ), T. Amilis, Y. Segui
Keywords
PLASMA , Infrared spectroscopy , Organosilicon , thin-film deposition
Journal title
Applied Surface Science
Serial Year
1999
Journal title
Applied Surface Science
Record number
995080
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