Acoustic property of PbTiO rSrTiO multilayer structures 3 3 prepared by MOCVD and PLD methods

PbTiO3rSrTiO3 PTrST.multilayer structures have been fabricated on PtrSrTiO3and PtrLaAlO3substrates. The PT layers were prepared by metalorganic chemical vapor deposition MOCVD.and the ST layers were prepared by pulsed laser deposition PLD.. The typical thickness of each PT and ST layer was 100 nm. The periodic number of the multilayer structures was 3,5,8,10, respectively. X-ray diffraction u–2u scan results indicated that the PT layers were 001.oriented in these multilayers. Several sets of acoustic resonators have been made of these mutilayer structures. The high-frequency acoustic resonance properties were analysed with a HP 8510C network analyzer. q1999 Elsevier Science B.V. All rights reserved.