Reference data for Auger electron spectroscopy and X-ray photoelectron spectroscopy combined

Recent reference work at NPL, in which measurements for Auger electron spectroscopy AES.and X-ray photoelectron spectroscopy XPS.are combined, is reviewed. For the energy calibration of both AES and XPS instruments new tables have been derived. These tables extend the existing work and homogenise it with new data for the X-ray energies and calculations of the X-ray lineshapes. For the intensity calibration of these instruments, new software has been developed incorporating many spectra as a reference base. In order to develop our understanding of the theory for the emitted intensities, elemental AES and XPS databases have been compiled. These allow a number of improvements in existing theory to produce a good convergence between theory and experiment. In all aspects, the combination of the two techniques is necessary to realise the full potential of the data and correlations required. Crown Copyright q1999 Published by Elsevier Science B.V. All rights reserved