Emission microscope observation of FEAs

Electron emission from a FEA was magnified by making use of an emission microscope, and the uniformity of the electron emission was examined. By resolving the electron emission from the each microtip, the stability of electron emission from a single microtip was successfully measured. Magnification factors of 100 and spatial resolution of 6 mm are achieved. The uniformity of the electron emission from the microtips depends on the uniformity of microtip apex size. It also depends on the uniformity of geometrical arrangement of the gate electrode and microtip. The emission stabilities of individual microtips are different and the emitted electron current fluctuates like pulses. q1999 Elsevier Science B.V. All rights reserved