Title of article
Application of the field emitter array to the vacuum measurements
Author/Authors
N. Ogiwara، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
5
From page
234
To page
238
Abstract
We have successfully used the Spindt field emitter array FEA.in the pressure measurements in ultrahigh vacuum UHV.
and extremely high vacuum XHV.. For applying the FEA to pressure measurements, we have made evaluation tests,
focusing on gas exposure and outgassing characteristics. The cold cathode hardly influenced the vacuum conditions,
compared to a hot-filament cathode. q1999 Elsevier Science B.V. All rights reserved
Keywords
Field emitter array , Vacuum , Pressure measurements
Journal title
Applied Surface Science
Serial Year
1999
Journal title
Applied Surface Science
Record number
995603
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