Preparation and characterization of MgO thin films by a simple nebulized spray pyrolysis technique

A simple nebulized spray pyrolysis method has been applied to prepare MgO thin films with 200. preferential orientation on 100.Si substrates by using magnesium acetate as starting reactants. The experimental results revealed that the substrates temperature and the oxygen flow played important roles in the formation of 200.oriented MgO film. The surface morphology and some properties of the prepared MgO thin films were examined by atomic force microscopy, transmission electron microscopy, X-ray diffraction and spread resistance processing technique. q1999 Elsevier Science B.V. All rights reserved.