Time-of-flight positron-annihilation induced Auger electron spectroscopy studies of adsorption of oxygen on Si 100/

The initial stage of adsorption of oxygen on Si 100. was studied by the time-of-flight positron-annihilation induced Auger electron spectroscopy TOF-PAES.. The adsorption of oxygen on top of Si 100. was investigated by the real-time measurements of oxygen and Si PAES intensities during and after O2 exposure. It was found that the initial stage of the top-site adsorption depends strongly on surface temperature, and that the top-site adsorption state is not stable. q1999 Elsevier Science B.V. All rights reserved.