Deposition of diamond-like carbon films by femtosecond laser ablation using frozen acetone targets

Diamond-like carbon DLC.films were deposited by ablation of frozen acetone with a 790-nm, 130-fs ultrashort pulsed laser. The films deposited at room temperature in vacuum were identified as DLC by Raman spectrum and other properties such as high electrical resistivity and chemical inertness. The sp3 fraction of the DLC film was estimated to be about 41% from an electron energy loss spectroscopy EELS.measurement. Optical emission was observed for comparing the plume generated by frozen acetone, frozen methanol, and graphite targets. Particles with flat surfaces were formed in a hydrogen atmosphere. q2000 Elsevier Science B.V. All rights reserved