Laser deposition of diamond-like films from liquid aromatic hydrocarbons

Diamond-like films are deposited on transparent substrates upon exposure of its interface with liquid hydrocarbons toluene C6H5CH3, benzene C6H6, and cumene C6H5CH CH3.2. to pulsed visible laser radiation of a copper vapor laser ls510.6 nm.. The X-ray Auger electron spectroscopy XAES., Reflection High Energy Electron Diffraction RHEED., profilometry, and ellipsometry are employed to characterize the deposited films. The sp3 fraction in the films amounts to 60%–70% and depends on the precursor. The addition of diamond nanoparticles to the liquid precursor results in their incorporation into the film. The average film thickness on a glass substrate increases with the number of laser shots and then saturates at about 100 nm. The films show excellent adherence and have microhardness of 50–70 GPa, as measured by nanoindentor. The effect of auto-regulation of the film thickness is discussed as the result of competition between ablation and deposition of the film. q2000 Elsevier Science B.V. All rights reserved.