Pulsed laser deposition of ZnO thin films using a femtosecond laser

Transparent, conductive ZnO films were deposited by pulsed laser deposition PLD.using 790-nm, 130-fs laser pulses. An optical transmittance as high as 88% in the visible region was obtained when deposited above 1508C. The electrical resistivity of the films was 10y1 to 10y3 V cm between room temperature and 2708C. Sharp X-ray diffraction XRD.peaks were observed for films deposited above 1508C on both quartz and Si. The results were obtained in absence of oxygen gas during the deposition, unlike in previous PLD where nanosecond laser pulses were used. q2000 Elsevier Science B.V. All rights reserved