Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition

Diamond-like carbon DLC.thin films have shown advantageous field emission properties due to a negative electron affinity NEA.and low work function. The experiment was performed at substrate temperature in the range of room temperature to 6008C. The laser energy density used was in the range 6–20 Jrcm2. SEM, Raman, photoluminescence PL., XPS and I–V measurement were used to investigate the microstructure and the field emission properties of DLC thin films. Deposition parameters, such as laser energy density and substrate temperature were optimized for the application of field emission properties. Good field emission properties were obtained with Eths5.03 Vrmm at 3008C and 12 Jrcm2. q2000 Elsevier Science B.V. All rights reserved.