Effect of sputtering gas on the surface composition of an Al–Pd–Mn quasicrystal

We demonstrate the effects of different inert sputtering gases on the surface composition of icosahedral i-. Al–Pd–Mn. The sputtering gases used include He, Ne, Ar, Xe, and Kr. We demonstrate that the steady-state composition is independent of the inert gas chosen. This steady-state composition falls outside of the quasicrystalline region of the Al–Pd–Mn phase diagram. However, the fluence ionsrcm2. to achieve steady-state depends on the inert gas. Helium requires a much higher fluence than the other gases. Because of this, He can be used to clean the surface, if the time fluence.for sputtering is kept to a minimum, without causing the large compositional shift induced with a relatively small fluence by the most common sputtering gas, Ar. q2000 Elsevier Science B.V. All rights reserved