Recombination of neutral oxygen atoms on stainless steel surface

The recombination coefficient of neutral oxygen atoms on polycrystalline AISI 304 stainless steel surface was determined experimentally. The source of neutral oxygen atoms was an inductively coupled RF oxygen plasma. The density of oxygen atoms was determined with a nickel catalytic probe and was between 3=1019 and 2=1021 my3. A virgin stainless steel disc was activated by exposure to atomic oxygen at the density of 1.5=1021 my3 for 120 s. During the activation, a layer of oxide with the thickness of about 10 nm was formed on the surface. After successful activation, the temperature of the stainless steel disc during exposures to atomic oxygen was measured at different O density and different pressure in the system. It was found that the recombination coefficient was a constant at the value of 0.070"0.009. q2000 Elsevier Science B.V. All rights reserved.