Wet oxidation of AlAsSb alloys catalyzed by methanol

This paper compares the results obtained from wet oxidation in vapor mixture of methanol–water with those from wet oxydation water vapor of AlAs Sb layers in arsenic based structures matched on InP and on InAs subtrates. All the x 1- x structures have been made by molecular beam epitaxy. The quality of the resulting oxide layers AlOx.were examined by means of scanning electron microscopy SEM., secondary ions mass spectrometry SIMS.and resistance measurements of the structures. The results described in this report demonstrate that the addition of methanol into water vapor reduces the amount of antimony and arsenic in the oxidized layers of n-type structures. q2000 Elsevier Science B.V. All rights reserved