Title of article
Work function change caused by alkali ion sputtering of a sample surface
Author/Authors
Yuriy Kudriavtsev )، نويسنده , , Rene Asomoza، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2000
Pages
6
From page
12
To page
17
Abstract
The steady state ion sputtering of a solid surface was studied. Based on a simple model, the surface concentration of ions
implanted during sputtering was calculated in the case of cesium ion sputtering of silicon. The corresponding work function
shift was calculated using the model developed. q2000 Published by Elsevier Science B.V.
Keywords
Ion sputtering , Ion implantation , Work function
Journal title
Applied Surface Science
Serial Year
2000
Journal title
Applied Surface Science
Record number
996568
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