Structural and vibrational characterization of hydrogenated carbon nitride thin ®lms obtained by laser-induced CVD

Hydrogenated carbon nitride thin ®lms were deposited on silicon substrates by laser-induced chemical vapor deposition (LCVD) using an ArF excimer laser (l ˆ 193 nm) and different C2H2/NH3 gas mixtures. The surface and bulk compositions were obtained from X-ray photoelectron spectroscopy (XPS) and elastic recoil detection analysis (ERDA), respectively. FTIR spectroscopy showed that the ®lms contain mainly C=C and sp2/sp3C±N bonds. Vibrational properties were also investigated by Raman spectroscopy in order to monitor the effect of the nitrogen incorporated in the deposited ®lms. The relationships between the composition and chemical bond types were discussed and referred to the deposition parameters. # 2000 Elsevier Science B.V. All rights reserved