Combination of contour and half-tone masks used in laser ablation

Excimer laser micro-machining has emerged as an important manufacturing process for micro-sized mechanical and optical components. Using the projection mask technique this work presents and evaluates a new type of mask capable of fabricating a variety of micro-structures with an improved surface quality. Details of the experimental procedure and the technical requirements are discussed and examples of machined surfaces are presented. # 2000 Elsevier Science B.V. All rights reserved.