Focused microprobes of high energy ions Ð versatile analytical probes for surfaces, interfaces and devices

Today, more than 50 laboratories world-wide (including more than seven in Japan and three in Australia) apply focused microprobes of high-energy ions to a wide range of problems involving materials analysis. MeV ions penetrate deeply into matter and can therefore be used to probe and image surface and deeply buried structures. High sensitivity (ppm) trace analysis is possible from induced X-rays and backscattered particles can be used to measure stoichiometry and produce depth pro®les down to about 10 mm below the specimen surface. The forward recoil of hydrogen displaced by heavier ions can be used to map the hydrogen distribution. Induced charge can be collected, so images of the charge collection ef®ciency of the specimen can be produced. This presentation reviews recent applications of these techniques to the study of a diverse range of materials and devices including synthetic diamond, ®liform corrosion tracks on aluminium, trace element contamination and charge collection ef®ciency in solar cells and the hydrogen distribution in solar cell material. # 2001 Elsevier Science B.V. All rights reserved