Copper ®lm prepared with ArF excimer laser

the lower electrical conductivity. In this study, Cu metal ®lms were deposited at room temperature on glass substrates by using ArF excimer laser, and the ®lm properties have been investigated. The source material was Cu(hfac)(TMVS). In XPS analyses, the peaks of C, F and O were not found in the ®lms. The resistivity of the samples was decreased sharply after the post-annealing in nitrogen atmosphere. # 2001 Elsevier Science B.V. All rights reserved.