Title of article
Studies on dc magnetron sputtered cadmium oxide ®lms
Author/Authors
T.K. Subramanyam*، نويسنده , , B. Srinivasulu Naidu، نويسنده , , S. Uthanna، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
6
From page
529
To page
534
Abstract
Thin ®lms of cadmium oxide (CdO) have been prepared by dc reactive magnetron sputtering on glass substrates held at a
®xed temperature of 623 K and at different oxygen partial pressures in 1 10ÿ4±5 10ÿ3 mbar range. The deposited ®lms
were characterized by studying the dependence of oxygen partial pressure on their chemical composition, crystallographic
structure, electrical and optical properties. Films with a low electrical resistivity of 8:2 10ÿ4 O cm and high visible
transmittance of 85% have been obtained at an oxygen partial pressure of 1 10ÿ3 mbar. # 2001 Elsevier Science B.V. All
rights reserved
Keywords
magnetron sputtering , Cadmium oxide , Oxygen pressure , Thin ®lms , CHEMICAL COMPOSITION , Physical properties
Journal title
Applied Surface Science
Serial Year
2001
Journal title
Applied Surface Science
Record number
996781
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