In¯uence of preferred orientation of lead zirconate titanate thin ®lm on the ferroelectric properties

Lead zirconate titanate (PZT) thin ®lms with highly (1 0 0)- and (1 1 1)-preferred orientation are obtained successfully through the control of bottom electrode orientation. The ®lms are investigated in terms of the effect of crystalline orientation on the electric and ferroelectric properties and the microstructure. The differences in electrical properties between (1 0 0)- and (1 1 1)-preferred PZT ®lms are discussed from the viewpoint of the relationship between external ®eld and polarization direction. From the XRD patterns of before and after fatigue, the distortion of crystal structure in (1 0 0)-preferred PZT was observed. From all the above results, we proposed that the grains having (1 0 0) orientation are one of the causes of fatigue. # 2001 Elsevier Science B.V. All rights reserved.