Metallic multilayers by new pulsed vacuum arc

We presents the new fabrication process of metallic superlattices such as Fe/C multilayers at length scales ranging from a few to hundreds of nanometers using pulsed-typed plasma with high electron density generated from the new coaxial vacuum arc. Transmission electron microscopy (TEM) techniques have been used to characterize the structure of these multilayers. Amorphous C and crystalline a-Fe multilayers with ¯at interfaces were fabricated by changing the number of pulse discharge and cathode targets. # 2001 Elsevier Science B.V. All rights reserved.