• Title of article

    Correlation between the carbon and hydrogen contents with the gas species and the plasma impedance of silicon carbide films produced by PECVD technique

  • Author/Authors

    R. Martins، نويسنده , , V. Silva، نويسنده , , H. ?guas، نويسنده , , A. Cabrita، نويسنده , , I. Ferreira، نويسنده , , E. Fortunato، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2001
  • Pages
    6
  • From page
    101
  • To page
    106
  • Abstract
    R. Martins, V. Silva, H. Águas, A. Cabrita, I. Ferreira, E. Fortunato
  • Keywords
    Plasma diagnostics , Plasma impedance , Amorphous silicon carbide
  • Journal title
    Applied Surface Science
  • Serial Year
    2001
  • Journal title
    Applied Surface Science
  • Record number

    997447

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=997447