Title of article
X-ray generation from fs laser heated Xe clusters
Author/Authors
K Kondo، نويسنده , , M Mori، نويسنده , , T Shiraishi، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2002
Pages
7
From page
138
To page
144
Abstract
The property of soft X-ray generation from Xe clusters irradiated with intense lasers was studied. The wavelength, the pulse width, and the pump energy were widely varied. Through this survey, even with the comparatively low-density Xe jet of <5×1018 cm−3 average atomic density, the highest conversion efficiency of over 10% from laser energy to soft X-ray (5–18 nm) was obtained with a femtosecond KrF laser pulse, where a 4π source was assumed.
Keywords
Soft X-ray generation , Optical high field , Ultrashort high peak power laser , EUV lithography , laser plasma , Cluster
Journal title
Applied Surface Science
Serial Year
2002
Journal title
Applied Surface Science
Record number
998180
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