Title of article
Transient processes and structural transformations in SixGe1−x layers during oxygen implantation and sputtering
Author/Authors
D Krüger، نويسنده , , A.A Efremov، نويسنده , , J Murota، نويسنده , , B Tillack، نويسنده , , R. Kurps، نويسنده , , G.Ph Romanova، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
5
From page
285
To page
289
Abstract
We analyze transient processes during oxygen bombardment and sputtering of epitaxial SixGe1−x layers with different compositions (0
Keywords
SiGe , Oxygen , Sputtering , SIMS
Journal title
Applied Surface Science
Serial Year
2003
Journal title
Applied Surface Science
Record number
998440
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