Title of article
A floating low energy electron gun (FLEG) for charge compensation in SIMS and other applications
Author/Authors
R. Gibbons، نويسنده , , M.G. Dowsett، نويسنده , , J. Kelly، نويسنده , , P. Blenkinsopp، نويسنده , , R. Hill، نويسنده , , D. Richards، نويسنده , , N. Loibl، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
5
From page
343
To page
347
Abstract
A floating low energy gun (FLEG) has been developed for charge neutralization in the SIMS analysis of insulating specimens. The FLEG has been characterized, and its effectiveness at low beam energies on fragile insulating samples has been compared with the performance of conventional electron guns.
Keywords
SIMS , Charge neutralization , Low energy gun , FLEG
Journal title
Applied Surface Science
Serial Year
2003
Journal title
Applied Surface Science
Record number
998453
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