Depth scale calibration of SIMS depth profiles by means of an online crater depth measurement technique

The depth scale calibration of a SIMS depth profile requires to determine the sputter rate used for the analysis from the crater depth measurement. An in situ crater depth measurement system based on the heterodyne laser interferometer has been developed. Experimental results demonstrate that crater depths can be measured from nanometers to micrometers range with an accuracy better than 5% in different matrices and a repeatability of 1%.