Study of range distribution parameters for fluorine ions implantation in AgGaS2 crystal

Range distributions for fluorine ions implanted in AgGaS2 in an energy range of 80–350 keV were measured by using the 19F(p,αγ)16O resonant nuclear reaction at ER=872.1 keV, with width Γ=4.2 keV. A proper convolution calculation method was used to extract the true distributions of fluorine from the experimental excitation yield curves. The range distribution parameters, Rp and ΔRp, were obtained and compared with those obtained from different Monte Carlo simulation computer codes.