Title of article
Mechanism about improvement of NiSi thermal stability for Ni/Pt/Si(1 1 1) bi-layered system
Author/Authors
R.N. Wang، نويسنده , , J.Y. Feng، نويسنده , , Y. Huang، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
5
From page
139
To page
143
Abstract
A thin interlayer of Pt can greatly enhance the thermal stability of NiSi films formed by rapid thermal annealing (RTA) on Si(1 1 1) substrates, as was revealed by X-ray diffraction (XRD) data and sheet resistance measurement. One possible reason for the enhanced NiSi thermal stability is attributed to the formation of the Ni0.945Pt0.055Si solid solution and its preferred orientation, leading to the decrease in the driving force and the increase in the interfacial energy change, respectively. Both of them increase the activation energy for the NiSi2 nucleation, improving the NiSi thermal stability.
Keywords
thermal stability , NiSi , The solid solution
Journal title
Applied Surface Science
Serial Year
2003
Journal title
Applied Surface Science
Record number
999754
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