DocumentCode
10007
Title
Development of Nanoelectromechanical Resonators for RFIC Applications
Author
Sanjay Raman استاد راهنما , Stephane Evoy استاد مشاور , Guo-Quan Lu استاد مشاور , Louis Guido استاد مشاور
University
Virginia Polytechnic Institute and state University
Grade
نامعلوم
Major
Master of Engineering )Electrical and Computer Engineering(
Number of pages
0
Publish Date
2002
Keyword
RFIC , NANOTECHNOLOGY , E-Beam Lithography , SOI Processing , Nanoelectromechanical , Filter , Integrated Circuit
Note
01
Language
انگليسي
Link To Document