• DocumentCode
    10007
  • Title

    Development of Nanoelectromechanical Resonators for RFIC Applications

  • Author

    Sanjay Raman استاد راهنما , Stephane Evoy استاد مشاور , Guo-Quan Lu استاد مشاور , Louis Guido استاد مشاور

  • University
    Virginia Polytechnic Institute and state University
  • Grade
    نامعلوم
  • Major
    Master of Engineering )Electrical and Computer Engineering(
  • Number of pages
    0
  • Publish Date
    2002
  • Keyword

    RFIC , NANOTECHNOLOGY , E-Beam Lithography , SOI Processing , Nanoelectromechanical , Filter , Integrated Circuit

  • Note
    01
  • Language
    انگليسي