DocumentCode
10475
Title
Spectroscopic Investigation of Local Bonding in Zirconium Silicate High-k Dielectric Alloys for Advanced Microelectronic Applications
Author
Gerald Lucovsky استاد راهنما
University
Raleigh North carolina state university
Grade
نامعلوم
Major
PhD )Physics(
Number of pages
0
Publish Date
2002
Keyword
local bonding , zirconium silicate alloys , high-k dielectics
Note
01
Language
انگليسي
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