DocumentCode
11847
Title
Integrated AlN/diamond heat spreaders for silicon device processing
Author
Jag Kasichainula استاد راهنما , Carl Osburn استاد مشاور
University
Virginia Polytechnic Institute and State Universtiy
Grade
نامعلوم
Major
Master of Science )Materials Science and Engineering(
Number of pages
0
Publish Date
2002
Keyword
Silicon , spreaders , Heat , integrated , device , AlN/diamond , Processing
Note
01
Language
انگليسي
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