DocumentCode
11860
Title
Investigation of the Mechanical Behavior of Microbeam-Based MEMS Devices
Author
Ali H. Nayfeh استاد راهنما
University
Virginia Polytechnic Institute and state University
Grade
نامعلوم
Major
Master of Science )Engineering Science and Mechanics(
Number of pages
0
Publish Date
2001
Keyword
Capacitive Microswitches , Reduced-Order Model , Electrostatic Resonators , MEMS , Pull-in
Note
01
Language
انگليسي
Link To Document