• DocumentCode
    11860
  • Title

    Investigation of the Mechanical Behavior of Microbeam-Based MEMS Devices

  • Author

    Ali H. Nayfeh استاد راهنما

  • University
    Virginia Polytechnic Institute and state University
  • Grade
    نامعلوم
  • Major
    Master of Science )Engineering Science and Mechanics(
  • Number of pages
    0
  • Publish Date
    2001
  • Keyword

    Capacitive Microswitches , Reduced-Order Model , Electrostatic Resonators , MEMS , Pull-in

  • Note
    01
  • Language
    انگليسي