DocumentCode
11861
Title
Modeling and Simulation of Microelectromechanical Systems in Multi-Physics Fields
Author
Ali H. Nayfeh استاد راهنما , Scott L. Hendricks استاد مشاور , Donald J. Leo استاد مشاور , Saad A. Ragab استاد مشاور
University
Virginia Polytechnic Institute and state University
Grade
نامعلوم
Major
PhD )Engineering Science and Mechanics(
Number of pages
0
Publish Date
2004
Keyword
Primary and Secondary Excitations , Singular Perturbation , Dynamic Pull-in Finite Element RF Switches Microbeams Microplates MEMS Electrostatic Actuation , Thermoelastic Damping , Squeeze-Film Damping , Resonators
Note
01
Language
انگليسي
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