DocumentCode
14370
Title
Ru-based Gate Electrodes for Advanced Dual-Metal Gate CMOS Devices
Author
V. Misra استاد راهنما , C. M. Osburn استاد مشاور , G. Lucovsky استاد مشاور , G. Parsons استاد مشاور
University
Virginia Polytechnic Institute and state University
Grade
نامعلوم
Major
PhD )Electrical Engineering(
Number of pages
0
Publish Date
2001
Keyword
Alloy , CMOS , gate electrode , Metal , Ruthenium
Note
01
Language
انگليسي
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