DocumentCode
15010
Title
Process-Induced Degradation during the Integration of Pb)Zr/x Ti/1-x(O3 Ferroelectric Capacitors
Author
Seshu B. Desu استاد راهنما , William T. Reynolds Jr استاد مشاور , In Kyeong Yoo استاد مشاور
University
Virginia Polytechnic Institute and state University
Grade
نامعلوم
Major
PhD )Materials Science and Engineering(
Number of pages
0
Publish Date
1999
Keyword
PZT , Thin film , FRAM
Note
01
Language
انگليسي
Link To Document