• DocumentCode
    15010
  • Title

    Process-Induced Degradation during the Integration of Pb)Zr/x Ti/1-x(O3 Ferroelectric Capacitors

  • Author

    Seshu B. Desu استاد راهنما , William T. Reynolds Jr استاد مشاور , In Kyeong Yoo استاد مشاور

  • University
    Virginia Polytechnic Institute and state University
  • Grade
    نامعلوم
  • Major
    PhD )Materials Science and Engineering(
  • Number of pages
    0
  • Publish Date
    1999
  • Keyword

    PZT , Thin film , FRAM

  • Note
    01
  • Language
    انگليسي