DocumentCode
15356
Title
The Radiation Induced Degradation of Poly)Diene Sulfones( as X-ray Resists
Author
William Daly استاد راهنما , Robert Strongin استاد مشاور , Erwin Poliakoff استاد مشاور
University
Lovisiana State University
Grade
نامعلوم
Major
Master of Science )M.S.( )Chemistry(
Number of pages
0
Publish Date
2002
Keyword
XANES , microlithography
Note
01
Language
انگليسي
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