DocumentCode
1570
Title
Integrated Circuit Metrology by Multilevel Patterning Technology
Author
Ashok Srivastava استاد مشاور , Martin Feldman استاد راهنما , Pratul K. Ajmera استاد مشاور
University
Lovisiana State University
Grade
دكتري
Major
Doctor of Philosophy )Ph.D.( )Electrical Computer Engineering(
Number of pages
0
Publish Date
2006
Keyword
Metrology , overlay , coordinate tool , encoder , image placement , Integrated Circuit
Note
01
Language
انگليسي
Link To Document