• DocumentCode
    19183
  • Title

    Analysis and Fabrication of MEMS Tunable Piezoelectric Resonators

  • Author

    William W. Clark استاد راهنما , Roy D. Marangoni استاد مشاور , Jeffery S. Vipperman استاد مشاور

  • University
    university of pittsburgh
  • Grade
    نامعلوم
  • Major
    Master of Science in Mechanical Engineering )Mechanical Engineering(
  • Number of pages
    0
  • Publish Date
    2006
  • Keyword

    film bulk acoustic wave , Lead zirconate titanate , sol gel , PZT , Frequency , surface acoustic wave , bending beam , tuning , MEMS , Piezoelectric , Resonators

  • Note
    01
  • Language
    انگليسي
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=17&DC=19183