DocumentCode
19198
Title
Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning
University
Brighan Young University Browse
Grade
نامعلوم
Major
PhD )Mechanical Engineering(
Number of pages
0
Publish Date
2003
Keyword
out-of-plane , surface micromachining , thermal actuation , TIM , MEMS , Microelectromechanical systems , micropositioning , Compliant Mechanisms , ortho-planar , thermomechanical in-plane microactuator
Note
01
Language
انگليسي
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